ULSI devices

"Ultra-Large-Scale Integration (ULSI), the next generation of semiconductor devices, has become a hot topic of investigation. ULSI Devices provides electrical and electronic engineers, applied physicists, and anyone involved in IC design and process development with a much-needed overview of key technology trends in this area. Edited by two of the foremost authorities on semiconductor device physics with contributions by some of the best-known researchers in the field, this comprehensive reference examines such major ULSI devices a MOSFET, nonvolatile semiconductor memory (NVSM), and the…